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Surface Micro-Structuring of Silica Glass by Laser-induced Backside Wet Etching
Laser ablation Excimer laser mask projection Diode-pumped solid state UV laser
2009/6/1
We have investigated a one-step method to fabricate a microstructure on a silica glass plate by using laser-induced backside wet etching (LIBWE) that consists of excimer laser mask projection system a...